MOSIS PARAMETRIC TEST RESULTS RUN: N9CN VENDOR: HP-NID TECHNOLOGY: SCN05 FEATURE SIZE: 0.5 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: Hewlett Packard AMOS14TB. TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.9/0.6 Vth 0.71 -0.87 volts SHORT 20.0/0.6 Idss 442 -202 uA/um Vth 0.61 -0.86 volts Vpt 10.0 -8.9 volts WIDE 20.0/0.6 Ids0 0.5 -0.2 pA/um LARGE 50.0/50.0 Gamma 0.66 0.43 V^0.5 Vth 0.69 -0.88 volts K' (Uo*Cox/2) 70.9 -26.7 uA/V^2 COMMENTS: Poly bias varies with design technology. To account for mask and etch bias use the appropriate value for the parameter XL in your SPICE model card. Design Technology XL ----------------- ------- SCN_SUBM (lambda=0.30), CMOSH, HP_CMOS14TB -0.10 SCN (lambda=0.35) -0.20 FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >15.0 <-15.0 volts PROCESS PARAMETERS N+ACTV P+ACTV POLY MTL1 MTL2 MTL3 PLY+BLK UNITS Sheet Resistance 2.6 2.8 2.5 0.07 0.07 0.05 113.5 ohms/sq Width Variation -0.39 -0.29 0.05 0.23 0.10 -0.25 microns (measured - drawn) Contact Resistance 2.0 2.1 1.8 0.61 0.41 ohms Gate Oxide Thickness 95 angstrom PROCESS PARAMETERS N_WELL UNITS Sheet Resistance 721 ohms/sq Width Variation microns (measured - drawn) Contact Resistance ohms COMMENTS: BLK is silicide block. CAPACITANCE PARAMETERS N+ACTV P+ACTV POLY MTL1 MTL2 MTL3 N_WELL UNITS Area (substrate) 482 930 92 31 16 12 94 aF/um^2 Area (N+active) 3636 aF/um^2 Area (P+active) 3474 aF/um^2 Area (poly) 62 18 10 aF/um^2 Area (metal1) 44 16 aF/um^2 Area (metal2) 44 aF/um^2 Area (cap well) 2244 aF/um^2 Fringe (substrate) 294 137 aF/um Overlap (N+active) 252 aF/um Overlap (P+active) 244 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 1.31 volts Vinv 1.5 1.47 volts Vol (100 uA) 2.0 0.28 volts Voh (100 uA) 2.0 2.97 volts Vinv 2.0 1.58 volts Gain 2.0 -16.29 Ring Oscillator Freq. DIV256 (31-stg,3.3V) 138.95 MHz Ring Oscillator Power DIV256 (31-stg,3.3V) 0.19 uW/MHz/g COMMENTS: SUBMICRON N9CN SPICE BSIM3 VERSION 3.1 PARAMETERS SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8 * DATE: Mar 8/00 * LOT: n9cn WAF: 259 * Temperature_parameters=Default .MODEL CMOSN NMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 9.5E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = 0.6542876 +K1 = 0.7363328 K2 = -0.0193356 K3 = 16.553119 +K3B = -1.6253024 W0 = 3.69253E-6 NLX = 1.420663E-8 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 6.5827523 DVT1 = 0.9629328 DVT2 = -0.1637105 +U0 = 483.0775597 UA = 4.35135E-10 UB = 1.463395E-18 +UC = 3.65719E-11 VSAT = 1.304325E5 A0 = 0.9533724 +AGS = 0.1876561 B0 = 2.14162E-6 B1 = 5E-6 +KETA = -1.495029E-3 A1 = 0 A2 = 1 +RDSW = 1.547317E3 PRWG = -0.0385328 PRWB = -0.0230793 +WR = 1 WINT = 2.585993E-7 LINT = 1.117231E-7 +XL = -1E-7 XW = 0 DWG = -1.266885E-8 +DWB = 8.670023E-9 VOFF = -0.0896698 NFACTOR = 1.2143784 +CIT = 0 CDSC = 2.4E-4 CDSCD = 1E-3 +CDSCB = 2.979369E-5 ETA0 = 1.270621E-3 ETAB = -1.00532E-3 +DSUB = 0.4161021 PCLM = 0.598379 PDIBLC1 = 0.1331006 +PDIBLC2 = 4.517047E-3 PDIBLCB = -0.0574694 DROUT = 0.6467011 +PSCBE1 = 7.870167E10 PSCBE2 = 3.586743E-8 PVAG = 0.2126969 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = -1.245E-15 WWN = 1.125 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 XPART = 0.4 CGDO = 2.52E-10 +CGSO = 2.52E-10 CGBO = 1E-11 CJ = 5.097241E-4 +PB = 0.99 MJ = 0.747984 CJSW = 4.289741E-10 +PBSW = 0.99 MJSW = 0.1 PVTH0 = 7.385051E-3 +PRDSW = -49.6706584 PK2 = 7.934431E-3 WKETA = -5.418169E-3 +LKETA = 6.411319E-3 PAGS = 0.0968 ) * .MODEL CMOSP PMOS ( LEVEL = 49 +VERSION = 3.1 TNOM = 27 TOX = 9.5E-9 +XJ = 1.5E-7 NCH = 1.7E17 VTH0 = -0.8576076 +K1 = 0.3744056 K2 = 0.0198434 K3 = 13.0568367 +K3B = -2.0915097 W0 = 1.455139E-6 NLX = 1.094457E-7 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 4.6005372 DVT1 = 0.5584791 DVT2 = -0.0356116 +U0 = 179.9227365 UA = 1.184088E-9 UB = 1.197382E-18 +UC = -4.98668E-11 VSAT = 2E5 A0 = 0.69487 +AGS = 0.3112466 B0 = 5.587762E-6 B1 = 5E-6 +KETA = 9.806091E-4 A1 = 0 A2 = 1 +RDSW = 2.805665E3 PRWG = -0.0273255 PRWB = -0.0327962 +WR = 1 WINT = 2.385477E-7 LINT = 5.187834E-8 +XL = -1E-7 XW = 0 DWG = -2.27332E-8 +DWB = 4.361341E-9 VOFF = -0.0956807 NFACTOR = 0.9637884 +CIT = 0 CDSC = 5.707153E-4 CDSCD = 2.363737E-4 +CDSCB = 1E-3 ETA0 = 0.052153 ETAB = -1.028479E-3 +DSUB = 0.3126836 PCLM = 5.2299955 PDIBLC1 = 1.344696E-4 +PDIBLC2 = 5.947217E-3 PDIBLCB = 5.576451E-3 DROUT = 0.0099941 +PSCBE1 = 1.235494E10 PSCBE2 = 5.002684E-10 PVAG = 15 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = -1.245E-15 WWN = 1.125 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 XPART = 0.4 CGDO = 2.44E-10 +CGSO = 2.44E-10 CGBO = 1E-11 CJ = 9.354025E-4 +PB = 0.9292322 MJ = 0.4739231 CJSW = 1.383204E-10 +PBSW = 0.4499766 MJSW = 0.1 PVTH0 = -4.036618E-3 +PRDSW = 28.3020436 PK2 = 2.435963E-3 WKETA = 4.449153E-3 +LKETA = 2.10717E-3 PAGS = 0.12532 ) *